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发明名称
SEASONING PLASMA PROCESSING SYSTEMS
摘要
申请公布号
KR20130033925(A)
申请公布日期
2013.04.04
申请号
KR20117031717
申请日期
2010.08.26
申请人
LAM RESEARCH CORPORATION
发明人
CHOI BRIAN;VENUGOPAL VIJAYAKUMAR C.
分类号
H01L21/205;H01L21/3065
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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