| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer transfer device capable of linearly transferring a wafer in a levitated state, and a wafer inspection apparatus comprising the same.SOLUTION: A wafer transfer device 4 includes: a levitation unit 21 that levitates a wafer 2; a transfer mechanism 23 that pushes out the wafer 2 in a transfer direction; and an air ejector 25 that makes air flow to the wafer 2 from a transfer-direction downstream side with respect to the wafer 2. The transfer mechanism 23 has a push-out part 41 that pushes out a transfer-direction upstream side end surface of the wafer 2 in the transfer direction. A wafer inspection apparatus 1 comprises the wafer transfer device 4. |
