发明名称 |
VERTICAL CAVITY SURFACE EMITTING LASER AND MANUFACTURING METHOD THEREOF |
摘要 |
The present invention discloses a manufacturing method of vertical cavity surface emitting laser. The method includes following steps: providing a substrate; forming an epitaxial layer stack including an aluminum-rich layer; forming an ion-doping mask including a ring-shaped opening; doping ions in the epitaxial layer stack through the ring-shaped opening and forming a ring-shaped ion-doped region over the aluminum-rich layer; forming an etching mask on the ion-doping mask for covering the ring-shaped opening of the ion-doping mask; etching the epitaxial layer stack through the etching mask and ion-doping mask for forming an island platform; oxidizing the aluminum-rich layer for forming a ring-shaped oxidized region. In addition, the present invention also discloses a vertical cavity surface emitting laser manufactured by the above mentioned method.
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申请公布号 |
US2013064263(A1) |
申请公布日期 |
2013.03.14 |
申请号 |
US201113231904 |
申请日期 |
2011.09.13 |
申请人 |
CHEN PO-HAN;WU CHENG-JU;PAN JIN-SHAN;TRUE LIGHT CORPORATION |
发明人 |
CHEN PO-HAN;WU CHENG-JU;PAN JIN-SHAN |
分类号 |
H01S5/026;H01L33/10 |
主分类号 |
H01S5/026 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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