NANOGRID CHANNEL FIN-FET TRANSISTOR AND BIOSENSOR

摘要

A transistor (100) includes a source region (130), a drain region (140), and a nanogrid channel (150) connecting the source and drain regions. The nanogrid channel includes first and second vertical channel regions (160) connecting the source and drain regions. The first and second vertical channel regions have a space (180) therebetween. A cross member (170) extends from the first vertical channel region to the second vertical channel region.