Bulk acoustic wave (BAW) resonator used in electrical filter, has electrodes that are respectively located over piezoelectric layer, and bridge that is positioned between electrodes

摘要

The resonator (1100) has a cavity that is comprised with perimeter bordering an active region. A distributed Bragg reflector (DBR) (118) is bordered in the cavity. An electrode (107) is positioned over the substrate (105). A piezoelectric layer (108) is located over the electrode (107). Another electrode (111) is provided over the piezoelectric layer. The piezoelectric layer (112) is positioned over the electrode (111). The electrode (101) is located over the piezoelectric layer. A bridge is positioned between the electrodes (107,101).