| 摘要 |
PURPOSE: An apparatus and a method for aligning a template assembly are provided to prevent misalignment by attaching an assembly to a rubber chuck. CONSTITUTION: A mounting member(200) is formed on a base(100). A rubber chuck is mounted in the mounting member. A guide ring(300) covers a part of the edge of the rubber chuck. An alignment member arranges the guide ring. A guide rail is formed on the base.
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