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发明名称
Method of polishing and polishing machine
摘要
申请公布号
EP1386694(B2)
申请公布日期
2013.01.09
申请号
EP20030025546
申请日期
2001.01.11
申请人
CARL ZEISS VISION GMBH
发明人
KUEBLER, CHRISTOPH
分类号
B24B13/02;B24B41/04;B24B45/00;B24B47/10;B24B49/16
主分类号
B24B13/02
代理机构
代理人
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地址
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