发明名称 DOCKING DEVICE, DOCKING METHOD
摘要 A docking device (10) for connecting a semiconductor probe (2) to a semiconductor handler (1) has in each case one probe-side and one handler-side connecting device (11, 12), a handling device (31-35) for handling a contact-making device (23) and a coupling device (13-16) for coupling the connecting devices (11, 12). The coupling device (13-16) has a first shifting device, which allows the translational and guided shifting of the probe-side connecting device (12) relative to the handler-side connecting device (11) towards and away from one another.
申请公布号 WO2012123443(A3) 申请公布日期 2012.11.22
申请号 WO2012EP54361 申请日期 2012.03.13
申请人 ESMO AG;HUBER, WERNER;SUGIANTO, YUSMAN;SNG, CHENG, KHOON, CLEMENT 发明人 HUBER, WERNER;SUGIANTO, YUSMAN;SNG, CHENG, KHOON, CLEMENT
分类号 G01R31/28 主分类号 G01R31/28
代理机构 代理人
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