发明名称 |
ILLUMINATION OPTICAL DEVICE, ILLUMINATION METHOD, AND EXPOSURE METHOD AND DEVICE |
摘要 |
An illumination optical apparatus includes a light splitting device which splits the beam into a plurality of beams with respective polarization states different from each other, a spatial light modulation device which is arranged on at least one of a first optical path in which a first beam out of the plurality of beams travels and a second optical path in which a second beam out of the plurality of beams travels, and which has a plurality of optical elements arranged two-dimensionally and driven individually and a control device which controls the spatial modulation device to combine the first beam and the second beam at least in part. |
申请公布号 |
US2012249989(A1) |
申请公布日期 |
2012.10.04 |
申请号 |
US201213494749 |
申请日期 |
2012.06.12 |
申请人 |
FUJII TORU;NIKON CORPORATION |
发明人 |
FUJII TORU |
分类号 |
G03F7/20;G02B26/00;G03B27/72 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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