发明名称 Method for joining a film onto a substrate
摘要 A method for joining a film onto a substrate comprises: a step (A) of floating the film on an interface between an aqueous liquid and a water-insoluble liquid; a step (B) of immersing the substrate into the aqueous liquid; a step (C) of stacking the substrate onto said one surface of the film in the aqueous liquid; a step (D) of immersing the stacked substrate and film into the water-insoluble liquid with maintaining the substrate being stacked on the film to adhere the film to the substrate; and a step (E) of drawing up the stacked substrate and film from the water-insoluble liquid with maintaining the substrate being stacked on the film to join the film onto the substrate.
申请公布号 US8278133(B2) 申请公布日期 2012.10.02
申请号 US201113277004 申请日期 2011.10.19
申请人 NAKAGAWA TOHRU;ITOH AKIHIRO;PANASONIC CORPORATION 发明人 NAKAGAWA TOHRU;ITOH AKIHIRO
分类号 H01L21/00 主分类号 H01L21/00
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