发明名称 |
Method for joining a film onto a substrate |
摘要 |
A method for joining a film onto a substrate comprises: a step (A) of floating the film on an interface between an aqueous liquid and a water-insoluble liquid; a step (B) of immersing the substrate into the aqueous liquid; a step (C) of stacking the substrate onto said one surface of the film in the aqueous liquid; a step (D) of immersing the stacked substrate and film into the water-insoluble liquid with maintaining the substrate being stacked on the film to adhere the film to the substrate; and a step (E) of drawing up the stacked substrate and film from the water-insoluble liquid with maintaining the substrate being stacked on the film to join the film onto the substrate.
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申请公布号 |
US8278133(B2) |
申请公布日期 |
2012.10.02 |
申请号 |
US201113277004 |
申请日期 |
2011.10.19 |
申请人 |
NAKAGAWA TOHRU;ITOH AKIHIRO;PANASONIC CORPORATION |
发明人 |
NAKAGAWA TOHRU;ITOH AKIHIRO |
分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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