METHOD FOR SEPARATING A TARGET OF A ROTARY TARGET

摘要

A method for separating a target of a rotary target according to the present invention separates the target which is bonded to an outer peripheral surface of a backing tube by a bonding agent comprising indium and media powder, from the backing tube after using the rotary target, wherein the method comprises the following steps: (a) heating the rotary target to the temperature higher than the melting temperature of indium so as to melt and remove a portion of the indium; (b) soaking the rotary target in which a portion of the indium is molten and removed in step (a), in a hydrochloric acid solution for a predetermined time to enable the indium and media powder to corrode; (c) heating the rotary target in which the indium and media powder have corroded in the hydrochloric acid solution in step (b) to the temperature higher than the melting temperature of indium so as to melt and remove the residual indium; and (d) pushing the target from the outer peripheral surface of the backing tube toward one side to separate the target after melting and removing the indium through the heating process in step (c). According to the present invention, unit cost of production may be reduced.