| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface property measuring machine capable of reducing measurement time. <P>SOLUTION: The present invention comprises: a turntable 20 to place a measurement object W thereon; a detection means 30 to generate a signal corresponding to surface property of the measurement object W; a detection device drive mechanism 40 to cause relative movement between the turntable and the detection means; and a processing device 60 which loads the signal from the detection means and obtains the surface property such as a shape or roughness of the measurement object by processing the loaded signal. The detection means has a plurality of detectors 31 and 32. The processing device 60 processes the signals from the detectors 31 and 32 by loading the same in order. <P>COPYRIGHT: (C)2012,JPO&INPIT |
