| 摘要 |
A system for purifying a vapor-gas mixture of silicon hydrochlorination reaction products relates to production of polycrystalline silicon for the needs of micro-electronics, solar energy, electronics, etc. and allows for efficient reuse of valuable by-products formed during silicon hydrochlorination, and increase of technical and economic parameters of the process, along with an increase of the purity of produced trichlorosilane, being simple, reliable with simplified process of maintenance. |
