| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma deposition apparatus and method for manufacturing solar cells. <P>SOLUTION: A plasma deposition apparatus for manufacturing solar cells comprises: a conveyor having a longitudinal axis for supporting at least one substrate; at least two modules each having at least one plasma torch for depositing a layer of a reaction product on the at least one substrate and located a distance from the at least one substrate; a chamber containing the conveyor and the at least two modules; and an exhaust system. In another embodiment, the plasma deposition apparatus for manufacturing solar cells comprises: means for supporting a substrate; means for supplying reactants; plasma torch means for depositing a product on the substrate and located a distance from the substrate; and means for oscillating the plasma torch means relative to the substrate. <P>COPYRIGHT: (C)2012,JPO&INPIT |
