| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection apparatus in Hartmann method in which the spatial resolution is improved. <P>SOLUTION: An inspection apparatus 10 includes a microlens array 16 which is pupil division means for dividing at least the part of an exit pupil of a test lens 20 and for forming the image of the exit pupil in each area divided, an imaging element 17 for detecting the image of the exit pupil formed in the microlens array 16, and a movement mechanism part 18 for relatively moving the microlens array 16 to the test lens 20 in the plane in which the exit pupil is divided. <P>COPYRIGHT: (C)2012,JPO&INPIT |
