OPTICAL MEASURING APPARATUS

摘要

PURPOSE: An optical measuring device is provided to scan a lot per unit hour because a line beam formed by a cylindrical lens and focused on a first opening device is linearly focused on a so that scanning at high speeds is possible. CONSTITUTION: An optical measuring device comprises a light source(102), a linear polarizing device(106), a polarizing beam splitter(112), a 1/4 wavelength plate(116), an objective lens(118), and a light receiving unit(130). The polarizing beam splitter is transfers the linear-polarized lights irradiating to one between a first optical path and second optical path. The 1/4 wavelength plate transfers circular-polarizes the lights linear-polarized and separated, thereby transferring to a direction of a measuring object(120). The 1/4 wavelength plate linear-polarizes the circular-polarized lights to the second optical path of a polarizing beam splitter. The objective lens generates a chromatic aberration, thereby generating lights of a plurality of wavelengths. The light receiving unit generates shape information of the measuring object from the light transmitted the second optical path.