发明名称 |
ELECTROMECHANICAL RESONATOR WITH RESONATING ANCHOR |
摘要 |
<p>An electromechanical resonator produced on a substrate, and a method of producing thereof, including: a suspended structure produced at least partly from the substrate, configured to have a vibration imparted to it such that it resonates at least one natural resonance frequency of the suspended structure; an anchor structure to anchor the suspended structure, by at least one area of its periphery, to the remainder of the substrate, and dimensioned to resonate at the resonance frequency; a mechanism to excite the suspended structure, to cause it to vibrate at the resonance frequency; and a mechanism to detect the vibration frequency of the suspended structure.</p> |
申请公布号 |
EP2441170(A1) |
申请公布日期 |
2012.04.18 |
申请号 |
EP20100724796 |
申请日期 |
2010.06.07 |
申请人 |
COMMISSARIAT A L&apos,ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES |
发明人 |
HENTZ, SEBASTIEN;ARCAMONE, JULIEN |
分类号 |
H03H9/02;G01C19/56;H03H3/007;H03H9/24 |
主分类号 |
H03H9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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