| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a shaft capable of reducing deterioration of thermal uniformity of surface temperature. <P>SOLUTION: A shaft 100 has, on a surface connected to a heater plate, a plurality of first through holes 110 for inserting a conductor, and a plurality of second through holes 120 for inserting a fixing member for mechanically fixing the heater plate and the shaft 100. The first through holes 110 are spaced apart from each other on a first circular ring around a midportion of the surface connected to the heater plate, and the second through holes 120 are spaced apart from each other on a second circular ring coaxial with the first circular ring. Each of the first through holes 110 and each of the second through holes 120 are disposed so that the center of the first through hole 110 and the center of the second through hole 120 are not aligned in a straight line when the outside of the shaft is viewed from the centers of the first circular ring and the second circular ring. <P>COPYRIGHT: (C)2012,JPO&INPIT |
