PRETREATMENT METHOD OF COMPONENT OF DEPOSITION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a pretreatment method of a component of a deposition device for efficiently forming a pre-coat layer where the particle amount is reduced for the component of the deposition device.

SOLUTION: This pretreatment method of the component of the deposition device includes a process of forming a thermal-sprayed metal layer by thermal spraying to the component of the deposition device before the component of the deposition device is used for the deposition device, and a process of vibrating the component of the deposition device having the thermal-sprayed metal layer and then performing air blow.

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