| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a fluorescent X-ray analyzer and computer program capable of measuring precisely element concentration in a sample without using a standard sample. <P>SOLUTION: An X-ray detector 13 detects a secondary X-ray from a sample S and an MCA 14 acquires a spectrum of the secondary X-ray. An analyzer 2 calculates the average atomic number of the sample S from a scattering X-ray signal contained in the spectrum. The analyzer 2 selects compositions of materials containing elements not to be measured from a list and assumes them sequentially, calculates the concentration of each element in the sample on the basis of intensity of the fluorescent X-ray signal contained in the spectrum for each of the assumed compositions, and calculates the theoretical value of the average atomic number. Furthermore, the analyzer 2 determines the calculation result of the element concentration calculated under the assumption that the theoretical value of the average atomic number is a value corresponding to the average atomic number of the sample S, as the concentration of each element in the sample S. <P>COPYRIGHT: (C)2012,JPO&INPIT |
