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发明名称
RADIATION SOURCE.
摘要
申请公布号
NL2007864(A)
申请公布日期
2011.12.22
申请号
NL20112007864
申请日期
2011.11.25
申请人
ASML NETHERLANDS B.V.
发明人
YAKUNIN, ANDREI;IVANOV, VLADIMIR;SCHOOT, JAN;KRIVTSUN, VLADIMIR;SWINKELS, GERARDUS;MEDVEDEV, VIACHESLAV
分类号
G03F7/20;H05G2/00
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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