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发明名称
APPARATUS FOR PROCESSING SUBSTRATE AND VENTING METHOD FOR THE SAME
摘要
申请公布号
KR101092852(B1)
申请公布日期
2011.12.14
申请号
KR20090063631
申请日期
2009.07.13
申请人
发明人
分类号
H01L21/02;H01L21/205;H01L21/3065
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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