发明名称 SEMICONDUCTOR TESTING APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To achieve a semiconductor testing apparatus which is capable of improving user-friendliness. <P>SOLUTION: The semiconductor testing apparatus for testing a device to be tested by using a low-speed rate signal and a high-speed rate signal different in speed from each other, comprises: a rate length setting register for setting a rate length of the high-speed rate signal; and an operation control unit for extracting a combination of high-speed rate numbers set in a pattern program, replacing one of the high-speed rate numbers in the combination, with an adjustment rate number, calculating a rate length of the adjustment rate number on the basis of time resolution of a rate length of the low-speed rate signal, and setting the calculated rate length to a rate length setting register for the adjustment rate number. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2011247654(A) 申请公布日期 2011.12.08
申请号 JP20100118926 申请日期 2010.05.25
申请人 YOKOGAWA ELECTRIC CORP 发明人 YOSHIDA TAKASHI
分类号 G01R31/28 主分类号 G01R31/28
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