发明名称 Temporary adhesive composition, and method of producing thin wafer
摘要 <p>A temporary adhesive for which temporary adhesion is simple and subsequent detachment is also simple, meaning productivity can be improved. Also, a method of producing a thin wafer that uses the temporary adhesive. The temporary adhesive composition comprises: (A) an organopolysiloxane comprising: (I) 40 to 99 mol% of siloxane units represented by R 1 SiO 3/2 (T units), (II) 0 to 49 mol% of siloxane units represented by R 2 R 3 SiO 2/2 units (D units) and (III) 1 to 25 mol% of siloxane units represented by R 4 R 5 R 6 SiO 1/2 units (M units) (wherein each of R 1 to R 6 represents an unsubstituted or substituted monovalent hydrocarbon group of 1 to 10 carbon atoms), and having a weight-average molecular weight exceeding 2,000, and (B) an organic solvent having a boiling point of not more than 220°C.</p>
申请公布号 EP2392629(A1) 申请公布日期 2011.12.07
申请号 EP20110004557 申请日期 2011.06.03
申请人 SHIN-ETSU CHEMICAL CO., LTD. 发明人 FURUYA, MASAHIRO
分类号 C09J183/04;H01L21/683 主分类号 C09J183/04
代理机构 代理人
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