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发明名称
METHOD OF THREE DIMENSIONAL MESUREMENT
摘要
申请公布号
KR20110115752(A)
申请公布日期
2011.10.24
申请号
KR20100035255
申请日期
2010.04.16
申请人
KOH YOUNG TECHNOLOGY INC.
发明人
KWON, DAL AN
分类号
G01B11/25;G01N21/956;G06T15/00;H01L21/66
主分类号
G01B11/25
代理机构
代理人
主权项
地址
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