发明名称 SEMICONDUCTOR DEVICE WITH BURIED GATE AND METHOD FOR FABRICATING THE SAME
摘要 <p>A semiconductor device includes a supplementary layer and a silicon layer stacked over a substrate, a trench penetrating the supplementary layer and the silicon layer and formed over the substrate, a gate insulation layer formed along a surface of the trench, and a buried gate formed over the gate insulation layer and filling a portion of the trench.</p>
申请公布号 KR20110109752(A) 申请公布日期 2011.10.06
申请号 KR20100029611 申请日期 2010.03.31
申请人 HYNIX SEMICONDUCTOR INC. 发明人 LEE, SEUNG RYONG;AHN, TAE HANG
分类号 H01L21/336;H01L21/335 主分类号 H01L21/336
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