| 摘要 |
<P>PROBLEM TO BE SOLVED: To accurately detect a sheet-shaped mold when transferring and positioning the sheet-shaped mold having a minute transfer pattern formed thereon. <P>SOLUTION: This sheet-shaped mold position detector 183 used when the sheet-shaped mold M having the minute transfer pattern M1 formed thereon is transferred and positioned, includes a sheet-shaped mold position detection means 191 detecting a predetermined portion of the sheet-shaped mold M by detecting a light transmission rate in the sheet-shaped mold M. <P>COPYRIGHT: (C)2011,JPO&INPIT |
