发明名称 SEMICONDUCTOR DEVICE, AND MANUFACTURING METHOD FOR SAME
摘要 <p>Disclosed is a semiconductor device which is provided with an n-channel type first TFT and a p-channel type second TFT formed on the same substrate. The first TFT has a first semiconductor layer (27), and the second TFT has a second semiconductor layer (22). The first semiconductor layer (27) and the second semiconductor layer (27) are formed from the same film, and each has a sloping section (27e, 22e) located around the edge thereof, and a main section (27m, 22m) comprising the part excluding the sloping section. A p-type impurity having a higher concentration than the main section (27m) of the first semiconductor layer, the main section (22m) of the second semiconductor layer, and the sloping section (22e) of the second semiconductor layer, is introduced only on a part of the sloping section (27e) of the first semiconductor layer. Thus, the drive voltage of the semiconductor device provided with an n-type TFT and a p-type TFT can be reduced.</p>
申请公布号 WO2011096387(A1) 申请公布日期 2011.08.11
申请号 WO2011JP52010 申请日期 2011.02.01
申请人 SHARP KABUSHIKI KAISHA;MAKITA NAOKI;MORI HIROKI;SAITOH MASAKI 发明人 MAKITA NAOKI;MORI HIROKI;SAITOH MASAKI
分类号 H01L29/786;H01L21/20;H01L21/336;H01L21/8238;H01L27/08;H01L27/092 主分类号 H01L29/786
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