| 摘要 |
PURPOSE: An optical interference measuring method and apparatus are provided to create interference light through interference between reflected light and reference light and measure an object using the interference light. CONSTITUTION: An optical interference measuring apparatus comprises a light source unit(2) which emits light, an optical splitter which divides the light emitted from the light source unit into measurement light and reference light, an interference light detector which detects interference light in which the measurement light reflected or scattered from an object(11) and the reference light are interfered, an optical path length adjusting mechanism(13) which is installed in the optical path of the reference light, and an operation control unit(3) which determines whether the image formed by the interference light is a normal image or an inverted image base on the change of the interference light.
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