发明名称 VERFAHREN ZUR STEUERUNG DES HERSTELLUNGSPROZESSES EINER PHOTOELEKTRISCHEN WANDLERVORRICHTUNG
摘要 <p>Disclosed is a method of controlling a manufacturing process of a photoelectric conversion apparatus, comprising putting a mark (3) for controlling the manufacturing process in a peripheral region (2) on a surface of a transparent substrate or in that region of a side surface of the transparent substrate, which is not irradiated with the laser beam used for the laser-scribing of each of a transparent electrode layer, a semiconductor layer and a reverse electrode layer, the mark (3) being read in the subsequent process and the subsequent process being controlled by utilizing the mark thus read.</p>
申请公布号 AT516598(T) 申请公布日期 2011.07.15
申请号 AT20070112029T 申请日期 2000.03.06
申请人 KANEKA CORPORATION 发明人 HIRAISHI, MASAFUMI;SAWAI, KAZUNORI
分类号 H01L31/04;H01L31/042;H01L31/20 主分类号 H01L31/04
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