发明名称 |
VERFAHREN ZUR STEUERUNG DES HERSTELLUNGSPROZESSES EINER PHOTOELEKTRISCHEN WANDLERVORRICHTUNG |
摘要 |
<p>Disclosed is a method of controlling a manufacturing process of a photoelectric conversion apparatus, comprising putting a mark (3) for controlling the manufacturing process in a peripheral region (2) on a surface of a transparent substrate or in that region of a side surface of the transparent substrate, which is not irradiated with the laser beam used for the laser-scribing of each of a transparent electrode layer, a semiconductor layer and a reverse electrode layer, the mark (3) being read in the subsequent process and the subsequent process being controlled by utilizing the mark thus read.</p> |
申请公布号 |
AT516598(T) |
申请公布日期 |
2011.07.15 |
申请号 |
AT20070112029T |
申请日期 |
2000.03.06 |
申请人 |
KANEKA CORPORATION |
发明人 |
HIRAISHI, MASAFUMI;SAWAI, KAZUNORI |
分类号 |
H01L31/04;H01L31/042;H01L31/20 |
主分类号 |
H01L31/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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