| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin ultrasonic sensor insertable even into a narrow part, by solving the problem on a connection between a piezoelectric element and wiring, concerning the thin ultrasonic sensor used for inspection of a narrow part, especially a double tube structure, and to provide a method for manufacturing and a method for using the thin ultrasonic sensor. SOLUTION: In this ultrasonic sensor, A plurality of independent electrodes 101 formed in an array shape are arrayed two-dimensionally on at least either surface 701a of a front surface and a rear surface of the piezoelectric element 701 on the ultrasonic radiation side or on the back surface side, and each electrode 102 for wiring to each independent electrode 101 is formed on each clearance 104 between independent electrodes 101 so as to be on the surface 701a, and wiring 706 to an independent electrode 101 enclosed by electrodes among the plurality of independent electrodes 101 formed in the array shape on the surface 701a, is applied horizontally to the surface 701a direction from the electrode 102 for wiring. COPYRIGHT: (C)2011,JPO&INPIT
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