Wave guide structure and method of manufacturing same

摘要

Provided is a microelectromechanical system (MEMS) that includes a first structure 100 and second structure 200. The first structure and second structure may each include a first substrate 110 and a second substrate 120. The first substrate of each structure may have first and second surfaces that face each other. The first substrate may include a via etching hole pattern penetrating the first surface and the second surface and a first non-via etching hole pattern penetrating the first surface. The second substrate 120 of each structure may have third and fourth surfaces that face each other. The second substrate may include a second non-via etching hole pattern penetrating the third surface in a position corresponding to the via etching hole pattern of the first substrate. In the microelectromechanical system (MEMS) the second surface of the first substrate and the third surface of the second substrate may be bonded together.