| 摘要 |
<p>A fabricating apparatus of thin film pattern has a print roller device having a roll shape and wound by a blanket (15), a spray device provided around the print roller, and a print plate (20) of an engraved shape, in which groove of desired thin film shape and projected portion excluding groove are formed. The spray device sprays an etch resist solution (14a) on blanket. The etch resist solution contains surfactant(s) having an ethylene oxide fluorinated polymer. Independent claims are included for the following: (1) fabrication of thin film pattern; and (2) etch resist solution.</p> |
