TEMPLATE PROCESSING METHOD, PROGRAM, COMPUTER STORAGE MEDIUM, TEMPLATE PROCESSOR, AND IMPRINTING SYSTEM

摘要

PROBLEM TO BE SOLVED: To improve throughput of template processing while forming a film of a mold release agent appropriately on the surface of a template. SOLUTION: Template processing for forming the film of the mold release agent on the surface of the template includes cleaning the surface of the template (process A2), coating the surface of the template with the mold release agent by a coating unit (process A3), drying the mold release agent on the template (process A4), applying alcohol to the mold release agent on the template to stick the mold release agent closely to the surface of the template and eliminating the unreacted portion of the mold release agent (process A5), and drying to eliminate alcohol on the template (process A6), thus forming the film of the mold release agent with a predetermined film thickness on the surface of the template. COPYRIGHT: (C)2011,JPO&INPIT