| 摘要 |
<P>PROBLEM TO BE SOLVED: To control a fluid pressure to be supplied to a control object such as an air bearing with high stability and high sensitivity. <P>SOLUTION: The pressure control device measures a differential pressure between a reference pressure 6 and a measurement pressure 4 by a differential pressure gage 7, and opens/closes a nozzle flapper valve 3 according to the control command of a control device 8 to thereby control the pressure of fluid to be supplied to a control object 2. The pressure control device includes an solenoid valve 9 for protecting the differential pressure gage 7 from excessive pressure difference between the reference pressure 6 and the measurement pressure 4 in order to prevent the differential pressure gage 7 from being given any pressure which is equal to or more than a pressure resistance and damaged. The pressure value of the pressure control part 1 and a reference pressure 6 of a reference pressure generation device 5 and a pressure threshold by pressure switches 10a and 10b for making a relay 11 open/close the electromagnetic valve 9 are synchronously controlled, so that it is possible to control fluid control ranging from a low pressure to a high pressure with high sensitivity. <P>COPYRIGHT: (C)2011,JPO&INPIT |
