发明名称 |
VERFAHREN ZUR STEUERUNG DER IONENENERGIE IN RADIOFREQUENZPLASMEN |
摘要 |
A method of establishing a DC bias in front of at least one electrode in a plasma operating apparatus by applying an RF voltage with at least two harmonic frequency components with a controlled relative phase between the components, where at least one of the higher frequency components is established as an even multiple of the lower frequency component. |
申请公布号 |
AT504076(T) |
申请公布日期 |
2011.04.15 |
申请号 |
AT20080786101T |
申请日期 |
2008.07.11 |
申请人 |
RUHR-UNIVERSITAET BOCHUM |
发明人 |
HEIL, BRIAN;CZARNETZKI, UWE;BRINKMANN, RALF;MUSSENBROCK, THOMAS |
分类号 |
H01J37/32 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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