| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat treatment device obtaining a high temperature-rising speed by combining resistance heating with electromagnetic wave heating. SOLUTION: The heat treatment device for heat-treating a treated object includes a metal treatment container 4 configured to be exhausted, a placing stage 32 having a resistance heating heater part 36 and formed to place the treated object on its upper surface, a gas introducing means 14 introducing gas into the treatment container, an electromagnetic wave introducing means 50 introducing electromagnetic waves into the treatment container, and a device control part 58 controlling the entire device, thereby using heating by resistance heating by the resistance heating heater part disposed on the placing stage in combination with heating by the treated object itself with the electromagnetic waves introduced by the electromagnetic wave introducing means. COPYRIGHT: (C)2011,JPO&INPIT |
