IMAGING DEVICE AND IMAGING METHOD

摘要

PROBLEM TO BE SOLVED: To compress a detection dynamic range required for a detector in X-ray ptychography.SOLUTION: A two-dimensional detector 20 is disposed on a downstream side of a sample 10 irradiated with incident X-ray light L0. A shield 50 for blocking transmitted X-rays coming from the sample 10 is disposed between the sample 10 and the two-dimensional detector 20. A reference light source structure 40 is disposed on an upstream side of the sample 10. The reference light source structure 40 scatters a portion of the incident X-ray light L0 to irradiate the sample 10 with scattered light that acts as reference light for an in-line hologram. An X-ray diffraction pattern and in-line hologram corresponding to a structure of the sample 10 are formed on a detection surface of the two-dimensional detector 20. Light intensity detection patterns, which result from detection of the diffraction patterns and in-line holograms, are sequentially acquired while moving the sample 10 in steps, and a computation in an iterative phase recovery algorithm is performed on the acquired light intensity detection patterns to generate an image of the sample 10.SELECTED DRAWING: Figure 7