发明名称 |
Megasonic cleaning efficiency using auto-tuning of a RF generator at constant maximum efficiency |
摘要 |
A system and method of cleaning a substrate includes a megasonic chamber that includes a transducer and a substrate. The transducer is being oriented toward the substrate. A variable distance d separates the transducer and the substrate. The system also includes a dynamically adjustable RF generator that has an output coupled to the transducer.
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申请公布号 |
US7909934(B2) |
申请公布日期 |
2011.03.22 |
申请号 |
US20050217523 |
申请日期 |
2005.08.31 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
BOYD JOHN;KUTHI ANDRAS;SMITH MICHAEL G. R.;ANDERSON THOMAS W.;THIE WILLIAM |
分类号 |
B08B7/00;B06B1/02;B08B3/10;B08B3/12;B08B7/04;H01L21/00 |
主分类号 |
B08B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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