| 摘要 |
PURPOSE: A liquid treating apparatus and a liquid treating method thereof are provided to prevent the treating liquid from sticking to the other side of the substrate after liquid treatment by preventing the treating liquid from remaining on the lift pin. CONSTITUTION: A retaining plate(30) keeps a substrate(W). A lift pin plate(20) includes a lift pin(22) supporting a substrate from underneath. A rotation driving(39) rotates the retaining plate. The treatment liquid supplying unit supplies the treatment liquid to the other side of the substrate maintained by the supporting plate. |
