| 发明名称 |
ARRANGEMENT FOR COATING A SUBSTRATE |
| 摘要 |
The invention relates to an arrangement for coating a substrate (4) by means of a vapor distributor (3). This vapor distributor (3) is connected with a vaporizer crucible (7) via an inlet (5). At least one valve (13) is disposed between the crucible (7) and the inlet (5). The vaporizer crucible (7) is located in a chamber (12) which can be evacuated or flooded by means of a vacuum valve (11). |
| 申请公布号 |
KR20110020878(A) |
申请公布日期 |
2011.03.03 |
| 申请号 |
KR20107029839 |
申请日期 |
2009.04.08 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
BANGERT STEFAN;DIEGUEZ CAMPO JOSE MANUEL;KOENIG MICHAEL;KRISHNA NETY M.;KWAK BYUNG SUNG LEO |
| 分类号 |
C23C14/24 |
主分类号 |
C23C14/24 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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