| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat treatment apparatus capable of surely achieving both of protection of a seal member and prevention of adhesion of a reaction product while reducing useless energy consumption as much as possible. SOLUTION: A vertical furnace 10 includes a reaction tube 11, a heater 20, a manifold 16, and a cooling gas supply means 310. The manifold 16 has at least a flange support part 166 for supporting a flange part 122 of the reaction tube 11 and is constituted so as to be joined to the flange part 122 of the reaction tube 11 through an O-ring 174. Though holes 33 for guiding a cooling gas jetted from the cooling gas supply means 310 to the flange part 122 of the reaction tube 11 are formed on the flange support part 166. The cooling gas supply means 310 selectively jets the cooling gas to the flange support part 166 in the manifold 16. COPYRIGHT: (C)2011,JPO&INPIT
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