Method and Apparatus For Measuring In-Situ Characteristics Of Material Exfoliation

摘要

Methods and apparatus for measuring, in-situ, at least one characteristic of a bonding process between a material sheet and a substrate, include: producing acoustic signals in response to acoustic energy within at least one of the material sheet and the substrate proximate to a bonding interface between the material sheet and the substrate; and deriving the at least one characteristic of the bonding process from the acoustic signals.