| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas supply unit and a gas supply device, properly performing heat radiation from solenoid valves.SOLUTION: This gas supply unit 11 includes: a flow passage block 20 formed with a flow passage thereinside; and the plurality of solenoid valves 50 (50A) changing a flowing-through state of a gas flowing through the flow passage. Each solenoid valve 50 has a coil 52, and a case 53 disposed on the outer circumference of the coil 52. The flow passage block 20 is formed in a longways extending rectangular parallelepiped state, and has an upper face 20a mounted with the plurality of solenoid valves 50. The plurality of solenoid valves 50 are disposed linearly along a long direction of the upper face 20a. The gas supply unit 11 includes an electric heating plate 30 having: a flat plate part 31 extending along the long direction of the upper face 20a such that the flat plate part 31 straddles respective cases 53 of the plurality of solenoid valves 50, and abutting on each case 53; and fixing parts 32 connecting the flat plate part 31 to the upper face 20a of the flow passage block 20. |
