METHOD FOR RECOVERING USEFUL SOLID COMPONENT IN WASTE SLURRY

摘要

PROBLEM TO BE SOLVED: To provide a method for recovering a useful solid component in waste slurry that removes a metal component from waste slurry used in a semiconductor polishing process, containing a metal component including a titanium component, and diluted by washing water.SOLUTION: Waste slurry is concentrated and adjusted such that the pH is lower than 7 and the concentration of an oxidizing substance is higher than 100 mg/L. The adjusted waste slurry is repeatedly fed to a strong-acid cation exchanger in order to remove a metal component including Ti.