LITHOGRAPHIC APPARATUS, METHOD OF CONTROLLING THE APPARATUS, AND METHOD OF MANUFACTURING DEVICE BY USING THE LITHOGRAPHIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To reduce or eliminate imaging defects caused by bubbles in an immersion liquid while increasing a table speed.SOLUTION: There is disclosed the immersion lithographic apparatus which includes: a projection system configured to direct a patterned beam of radiation on a substrate supported by a table; a liquid handling system configured to supply and confine the immersion liquid to a space defined between a projection system and the table or a substrate, or both of them; and a controller to control a moving speed of the table relative to liquid handling on the basis of a distance between moving direction switches.