| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an apparatus and a method for growing a crystal which enable a prolonged use of a quartz crucible, and the improvement of operational efficiency. <P>SOLUTION: In the method of growing a crystal, the processes of: supplying molten material into a crucible coated with a releasing material on its inner face; forming a protruded part on the surface of the crystal by hardening the molten material in the crucible and immersing a crystal piece into a molten layer at a step wherein the residual molten material is not greater than 30%; and taking out the crystal from the crucible using the protruded part are repeatedly carried out reusing the same crucible. Further, in the method of growing a crystal, the silicon crystal may be taken out from the crucible while using the hanging device which grips the protruded part and applying vibration to a hanging device. Yet further, the silicon crystal may be taken out from the crucible while applying vibration to the crucible. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
