| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a charge exchange member having a novel function, which solves problems of fragility of a diamond thin film and a low electron density of a CNTS that are challenges of a charge exchange foil. <P>SOLUTION: The charge exchange device includes a diamond thin film and a non-woven carbon nanotube sheet, in which the diamond thin film is deposited on the non-woven carbon nanotube sheet. The diamond thin film is formed by a microwave plasma CVD method using the CNTS that is a substrate for laminated body as a carbon source for diamond thin film synthesis. <P>COPYRIGHT: (C)2011,JPO&INPIT |
