| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To facilitate installation and enable detection of an object to be detected. <P>SOLUTION: A light projection head 40 emits a diffused light P1 in which a light projection axis L1 is set by an upper side oblique angle from a slit 40b. A light receiving head 50 receives an incident light of a light receiving area A1 in which a light receiving axis L2 is set by a lower side oblique angle to a slit 50b and the width in the vertical direction becomes wider in proportion to a distance from the tip surface. Then, a detection area formed by the light projection head 40 and light receiving head 50 is in a rectangular range, and the center axis of the detection area extends along a horizontal direction and becomes parallel to the plate surface of a plate-like workpiece carried flatly. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
