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发明名称
METHOD FOR CLEANING SEMICONDUCTOR SUBSTRATE USING THE BUBBLE/MEDICAL FLUID MIXED CLEANING SOLUTION
摘要
申请公布号
KR100968668(B1)
申请公布日期
2010.07.06
申请号
KR20080049599
申请日期
2008.05.28
申请人
发明人
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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